DLC-Si protective coatings for polycarbonates

Materials Research

J.c. Damasceno²  S.s. Camargo Jr.²  M. Cremona¹ 

[1],Universidade Federal do Rio de Janeiro Engenharia Metalúrgica e de Materiais Rio de Janeiro RJ ,Brazil

关键词: thin films;    DLC;    chemical vapor deposition;    silicon carbide;    polycarbonate;   

DOI  :  10.1590/S1516-14392003000100005

来源: SciELO

【 摘 要 】

In this work, a-C:H:Si (DLC-Si) films were produced onto crystalline silicon and polycarbonate substrates by the rf-PACVD technique from gaseous mixtures of CH4 + SiH4 and C2H2 + SiH4. The effects of self-bias and gas composition upon mechanical and optical properties of the films were investigated. Micro-hardness, residual stress, surface roughness and refractive index measurements were employed for characterization. By incorporating low concentrations of silicon and by exploring the more favorable conditions for the rf-PACVD deposition technique, highly adherent DLC-Si thin films were produced with reduced internal stresses (lower than 1 GPa), high hardness (around 20 GPa) and high deposition rates (up to 10 µm/h). Results that show the technological viability of this material for application as protective coatings for polycarbonates are also discussed.

【 授权许可】

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