Fabrication of Thin-Film LAPS with Amorphous Silicon

Sensors

Tatsuo Yoshinobu⁴  Michael J. Schöning³  Friedhelm Finger¹  Werner Moritz² 

[1] IPV, Research Centre Jülich, 52425 Jülich, Germany;Humboldt University Berlin, Brook-Taylor-Str. 2, 12489 Berlin, Germany;University of Applied Sciences, Aachen (Division Jülich), Laboratory for Chemical Sensors and Biosensors, Ginsterweg 1, D-52428, Jülich, Germany;ISIR, Osaka University, 8-1 Mihogaoka, Ibaraki, Osaka 567-0047, Japan

关键词: LAPS;    chemical imaging sensor;    amorphous silicon;    pH sensor;   

DOI  :  10.3390/s41000163

来源: mdpi

【 摘 要 】

To improve the spatial resolution of the light-addressable potentiometric sensor (LAPS), it is necessary to reduce the thickness of the semiconductor layer, which, however, causes a problem of the mechanical strength of the sensor plate. In this study, a thin-film LAPS was fabricated with amorphous silicon (a-Si) deposited on a transparent glass substrate. The current-voltage characteristics and pH sensitivity of the fabricated a-Si LAPS were investigated.

【 授权许可】

Unknown   
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