Performance of a Diaphragmed Microlens for a Packaged Microspectrometer

Sensors

Joe Lo¹  Shih-Jui Chen³  Qiyin Fang²  Thanassis Papaioannou²  Eun-Sok Kim³  Martin Gundersen³ 

[1] Biomedical Engineering, University of Southern California, Los Angeles, CA, USA; E-Mail:;Cedars Sinai Medical Center, Los Angeles, CA, USA; E-Mail:;Electrical Engineering and Electrophysics, University of Southern California, Los Angeles, CA USA; E-Mails:

关键词: Microoptics;    microlens;    MEMS;    spectroscopy;    Gaussian propagation;   

DOI  :  10.3390/s90200859

来源: mdpi

【 摘 要 】

This paper describes the design, fabrication, packaging and testing of a microlens integrated in a multi-layered MEMS microspectrometer. The microlens was fabricated using modified PDMS molding to form a suspended lens diaphragm. Gaussian beam propagation model was used to measure the focal length and quantify M² value of the microlens. A tunable calibration source was set up to measure the response of the packaged device. Dual wavelength separation by the packaged device was demonstrated by CCD imaging and beam profiling of the spectroscopic output. We demonstrated specific techniques to measure critical parameters of microoptics systems for future optimization of spectroscopic devices.

【 授权许可】

CC BY   
© 2009 by the authors; licensee Molecular Diversity Preservation International, Basel, Switzerland.