Porous Dielectrics in Microelectronic Wiring Applications

Materials

关键词: porosity;    dielectric;    interconnect;    microelectronic;    integrated circuit;    semiconductor;   

DOI  :  10.3390/ma3010536

来源: mdpi

【 摘 要 】

Porous insulators are utilized in the wiring structure of microelectronic devices as a means of reducing, through low dielectric permittivity, power consumption and signal delay in integrated circuits. They are typically based on low density modifications of amorphous SiO₂ known as SiCOH or carbon-doped oxides, in which free volume is created through the removal of labile organic phases. Porous dielectrics pose a number of technological challenges related to chemical and mechanical stability, particularly in regard to semiconductor processing methods. This review discusses porous dielectric film preparation techniques, key issues encountered, and mitigation strategies.

【 授权许可】

CC BY   
© 2010 by the authors; licensee MDPI, Basel, Switzerland.