ISFET Based Microsensors for Environmental Monitoring

Sensors

Cecilia Jimenez-Jorquera¹  Jahir Orozco¹ 

关键词: ISFETs;    microsensors;    environmental monitoring;   

DOI  :  10.3390/s100100061

来源: mdpi

【 摘 要 】

The use of microsensors for in-field monitoring of environmental parameters is gaining interest due to their advantages over conventional sensors. Among them microsensors based on semiconductor technology offer additional advantages such as small size, robustness, low output impedance and rapid response. Besides, the technology used allows integration of circuitry and multiple sensors in the same substrate and accordingly they can be implemented in compact probes for particular applications e.g., in situ monitoring and/or on-line measurements. In the field of microsensors for environmental applications, Ion Selective Field Effect Transistors (ISFETs) have a special interest. They are particularly helpful for measuring pH and other ions in small volumes and they can be integrated in compact flow cells for continuous measurements. In this paper the technologies used to fabricate ISFETs and a review of the role of ISFETs in the environmental field are presented.

【 授权许可】

CC BY   
©2010 by the authors; licensee Molecular Diversity Preservation International, Basel, Switzerland.