Resonant Frequency Characteristics of a SAW Device Attached to Resonating Micropillars

Sensors

N. Ramakrishnan²  Harshal B. Nemade¹ 

[1] Electronics and Electrical Engineering and Centre for Nanotechnology, Indian Institute of Technology Guwahati, Guwahati 781039, India; E-Mail:;School of Engineering, Monash University Sunway Campus, Jalan Lagoon Selatan, 46150 Bandar Sunway, Selangor Darul Ehsan, Malaysia

关键词: surface acoustic wave devices;    resonance;    microsensors;   

DOI  :  10.3390/s120403789

来源: mdpi

【 摘 要 】

Recently we reported experimental and simulation results on an increase in resonance frequency of a SAW resonator caused by mass loading of micropillars made of SU-8, attached normal to the surface of the resonator. We concluded that SAW resonator and the SU-8 micropillars in unison form a system of coupled resonators. We have now extended this work and performed a finite element method simulation to study the resonance frequency characteristics of the SAW-based coupled resonator. In this paper we report the effect of the resonance frequency of the micropillars on the resonance frequency of the system of coupled resonators, and observe the coupling of micropillar resonance and the propagating SAW as described in the well known Dybwad system of coupled resonators.

【 授权许可】

CC BY   
© 2012 by the authors; licensee MDPI, Basel, Switzerland