Sensors | |
Design and Analysis of Impedance Pumps Utilizing Electromagnetic Actuation | |
Yu-Hisang Wang2  Yao-Wen Tsai2  Chien-Hsiung Tsai3  Chia-Yen Lee1  | |
[1] Department of Materials Engineering, National Pingtung University of Science and Technology, 912 Pingtung, Taiwan;Department of Mechanical and Automation Engineering, Da-Yeh University, 515 Changhua, Taiwan;Department of Vehicle Engineering, National Pingtung University of Science and Technology, 912 Pingtung, Taiwan | |
关键词: electromagnetic actuator; impedance pump; magnetic PDMS diaphragm; MEMS; | |
DOI : 10.3390/s100404040 | |
来源: mdpi | |
【 摘 要 】
This study designs and analyzes an impedance pump utilizing an electromagnetic actuator. The pump is designed to have three major components, namely a lower glass substrate patterned with a copper micro-coil, a microchannel, and an upper glass cover plate attached a magnetic PDMS diaphragm. When a current is passed through the micro-coil, an electromagnetic force is established between the coil and the magnetic diaphragm. The resulting deflection of the PDMS diaphragm creates an acoustic impedance mismatch within the microchannel, which results in a net flow. In performing the analysis, simulated models of the magnetic field, the diaphragm displacement and the flow rate are developed using Ansoft/Maxwell3D, ANSYS FEA and FLUENT 6.3 CFD software, respectively. Overall, the simulated results reveal that a net flow rate of 52.8 μL/min can be obtained using a diaphragm displacement of 31.5 μm induced by a micro-coil input current of 0.5 A. The impedance pump proposed in this study provides a valuable contribution to the ongoing development of Lab-on-Chips (LoCs) systems.
【 授权许可】
CC BY
© 2010 by the authors; licensee MDPI, Basel, Switzerland.
【 预 览 】
Files | Size | Format | View |
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RO202003190053915ZK.pdf | 348KB | download |