Design and Analysis of Impedance Pumps Utilizing Electromagnetic Actuation

Sensors

Yu-Hisang Wang²  Yao-Wen Tsai²  Chien-Hsiung Tsai³  Chia-Yen Lee¹ 

[1] Department of Materials Engineering, National Pingtung University of Science and Technology, 912 Pingtung, Taiwan;Department of Mechanical and Automation Engineering, Da-Yeh University, 515 Changhua, Taiwan;Department of Vehicle Engineering, National Pingtung University of Science and Technology, 912 Pingtung, Taiwan

关键词: electromagnetic actuator;    impedance pump;    magnetic PDMS diaphragm;    MEMS;   

DOI  :  10.3390/s100404040

来源: mdpi

【 摘 要 】

This study designs and analyzes an impedance pump utilizing an electromagnetic actuator. The pump is designed to have three major components, namely a lower glass substrate patterned with a copper micro-coil, a microchannel, and an upper glass cover plate attached a magnetic PDMS diaphragm. When a current is passed through the micro-coil, an electromagnetic force is established between the coil and the magnetic diaphragm. The resulting deflection of the PDMS diaphragm creates an acoustic impedance mismatch within the microchannel, which results in a net flow. In performing the analysis, simulated models of the magnetic field, the diaphragm displacement and the flow rate are developed using Ansoft/Maxwell3D, ANSYS FEA and FLUENT 6.3 CFD software, respectively. Overall, the simulated results reveal that a net flow rate of 52.8 μL/min can be obtained using a diaphragm displacement of 31.5 μm induced by a micro-coil input current of 0.5 A. The impedance pump proposed in this study provides a valuable contribution to the ongoing development of Lab-on-Chips (LoCs) systems.

【 授权许可】

CC BY   
© 2010 by the authors; licensee MDPI, Basel, Switzerland.