FPGA-Based Smart Sensor for Online Displacement Measurements Using a Heterodyne Interferometer

Sensors

Luis Alberto Vera-Salas¹  Sandra Veronica Moreno-Tapia¹  Arturo Garcia-Perez¹  Rene de Jesus Romero-Troncoso¹  Roque Alfredo Osornio-Rios²  Ibrahim Serroukh² 

[1] HSPdigital, CA Procesamiento Digital de Señales, CA Telematica, DICIS, Universidad de Guanajuato, Carr. Salamanca-Valle km 3.5+1.8, Palo Blanco, 36885 Salamanca, Gto., Mexico; E-Mails:;HSPdigital, CA Mecatronica, Facultad de Ingenieria, Campus San Juan del Rio, Universidad Autonoma de Queretaro, Rio Moctezuma 249, 76807 San Juan del Rio, Qro., Mexico; E-Mails:

关键词: smart sensor;    FPGA;    heterodyne interferometer;    phase measurement;   

DOI  :  10.3390/s110807710

来源: mdpi

【 摘 要 】

The measurement of small displacements on the nanometric scale demands metrological systems of high accuracy and precision. In this context, interferometer-based displacement measurements have become the main tools used for traceable dimensional metrology. The different industrial applications in which small displacement measurements are employed requires the use of online measurements, high speed processes, open architecture control systems, as well as good adaptability to specific process conditions. The main contribution of this work is the development of a smart sensor for large displacement measurement based on phase measurement which achieves high accuracy and resolution, designed to be used with a commercial heterodyne interferometer. The system is based on a low-cost Field Programmable Gate Array (FPGA) allowing the integration of several functions in a single portable device. This system is optimal for high speed applications where online measurement is needed and the reconfigurability feature allows the addition of different modules for error compensation, as might be required by a specific application.

【 授权许可】

CC BY   
© 2011 by the authors; licensee MDPI, Basel, Switzerland.