Investigation of the Carbon Monoxide Gas Sensing Characteristics of Tin Oxide Mixed Cerium Oxide Thin Films

Sensors

Sardar M. A. Durrani¹  Mohammad F. Al-Kuhaili²  Imran A. Bakhtiari² 

[1] Physics Department, King Fahd University of Petroleum and Minerals, Dhahran 31261, Saudi Arabia;

关键词: thin film;    AFM;    XPS;    CeO₂;    SnO₂;    CO sensor;    semiconductor gas sensor;   

DOI  :  10.3390/s120302598

来源: mdpi

【 摘 要 】

Thin films of tin oxide mixed cerium oxide were grown on unheated substrates by physical vapor deposition. The films were annealed in air at 500 °C for two hours, and were characterized using X-ray photoelectron spectroscopy, atomic force microscopy and optical spectrophotometry. X-ray photoelectron spectroscopy and atomic force microscopy results reveal that the films were highly porous and porosity of our films was found to be in the range of 11.6–21.7%. The films were investigated for the detection of carbon monoxide, and were found to be highly sensitive. We found that 430 °C was the optimum operating temperature for sensing CO gas at concentrations as low as 5 ppm. Our sensors exhibited fast response and recovery times of 26 s and 30 s, respectively.

【 授权许可】

CC BY   
© 2012 by the authors; licensee MDPI, Basel, Switzerland