Design and Fabrication of Single-Walled Carbon Nanonet Flexible Strain Sensors

Sensors

Ya-Ting Huang¹  Shyh-Chour Huang¹  Chih-Chao Hsu²  Ru-Min Chao² 

[1] Department of Mechanical Engineering, National Kaohsiung University of Applied Sciences, Kaohsiung 80778, Taiwan; E-Mails:;Systems and Naval Mechatronics Engineering, National Cheng-Kung University, Tainan 701, Taiwan; E-Mails:

关键词: Parylene-C;    single-walled carbon nanonets;    strain sensor;   

DOI  :  10.3390/s120303269

来源: mdpi

【 摘 要 】

This study presents a novel flexible strain sensor for real-time strain sensing. The material for strain sensing is single-walled carbon nanonets, grown using the alcohol catalytic chemical vapor deposition method, that were encapsulated between two layers of Parylene-C, with a polyimide layer as the sensing surface. All of the micro-fabrication was compatible with the standard IC process. Experimental results indicated that the gauge factor of the proposed strain sensor was larger than 4.5, approximately 2.0 times greater than those of commercial gauges. The results also demonstrated that the gauge factor is small when the growth time of SWCNNs is lengthier, and the gauge factor is large when the line width of the serpentine pattern of SWCNNs is small.

【 授权许可】

CC BY   
© 2012 by the authors; licensee MDPI, Basel, Switzerland