Optical Gratings Coated with Thin Si3N4 Layer for Efficient Immunosensing by Optical Waveguide Lightmode Spectroscopy

Biosensors

Lorena Diéguez²  David Caballero²  Josep Calderer³  Mauricio Moreno²  Elena Martínez¹ 

[1] Nanobioengineering Group, Institute for Bioengineering of Catalonia (IBEC), C/Baldiri Reixac 10-12, Barcelona, ES 08028, Spain; E-Mail:;Department of Electronics, University of Barcelona, C/Martí i Franquès 1, Barcelona, ES 08028, Spain; E-Mails:;Electronic Engineering Department, Universitat Politècnica de Catalunya, Campus Nord, Barcelona, ES 08034, Spain; E-Mail:

关键词: silicon nitride;    optical gratings;    waveguide;    biosensor;   

DOI  :  10.3390/bios2020114

来源: mdpi

【 摘 要 】

New silicon nitride coated optical gratings were tested by means of Optical Waveguide Lightmode Spectroscopy (OWLS). A thin layer of 10 nm of transparent silicon nitride was deposited on commercial optical gratings by means of sputtering. The quality of the layer was tested by x-ray photoelectron spectroscopy and atomic force microscopy. As a proof of concept, the sensors were successfully tested with OWLS by monitoring the concentration dependence on the detection of an antibody-protein pair. The potential of the Si₃N₄ as functional layer in a real-time biosensor opens new ways for the integration of optical waveguides with microelectronics.

【 授权许可】

CC BY   
© 2012 by the authors; licensee MDPI, Basel, Switzerland.