Design Considerations for a Micromachined Proportional Control Valve

Micromachines

Maarten S. Groen¹  Dannis M. Brouwer²  Remco J. Wiegerink¹ 

[1] MESA+ Institute for Nanotechnology, University of Twente, P.O. Box 217, 7500AE Enschede, The Netherlands;Mechanical Automation and Mechatronics, University of Twente, P.O. Box 217, 7500AE Enschede, The Netherlands;

关键词: microvalve;    flow control;    low leakage;    mass flow controller;    micro actuator;    MEMS;   

DOI  :  10.3390/mi3020396

来源: mdpi

【 摘 要 】

Precise mass flow control is an essential requirement for novel, small-scale fluidic systems. However, a small-volume, low-leakage proportional control valve for minute fluid flows has not yet been designed or manufactured. A survey is therefore made of the primary design considerations of a micromachined, proportional control valve. Performance requirements are identified based on various applications. Valve operating principles and actuation schemes presented in the literature are evaluated with respect to functionality and technological feasibility. Proceeding from these analyses, we identify the design concepts and actuation schemes that we think are best suited for the fabrication of the intended microvalve.

【 授权许可】

CC BY   
© 2012 by the authors; licensee MDPI, Basel, Switzerland.