Design and Analysis of a Compact Precision Positioning Platform Integrating Strain Gauges and the Piezoactuator

Sensors

Hu Huang²  Hongwei Zhao¹  Zhaojun Yang²  Zunqiang Fan²  Shunguang Wan²  Chengli Shi² 

[1] College of Mechanical Science and Engineering, Jilin University, Changchun 130025, China;

关键词: strain gauge;    piezoactuator;    precision positioning platform;    calibration;    closed-loop control;   

DOI  :  10.3390/s120709697

来源: mdpi

【 摘 要 】

Miniaturization precision positioning platforms are needed for in situ nanomechanical test applications. This paper proposes a compact precision positioning platform integrating strain gauges and the piezoactuator. Effects of geometric parameters of two parallel plates on Von Mises stress distribution as well as static and dynamic characteristics of the platform were studied by the finite element method. Results of the calibration experiment indicate that the strain gauge sensor has good linearity and its sensitivity is about 0.0468 mV/μm. A closed-loop control system was established to solve the problem of nonlinearity of the platform. Experimental results demonstrate that for the displacement control process, both the displacement increasing portion and the decreasing portion have good linearity, verifying that the control system is available. The developed platform has a compact structure but can realize displacement measurement with the embedded strain gauges, which is useful for the closed-loop control and structure miniaturization of piezo devices. It has potential applications in nanoindentation and nanoscratch tests, especially in the field of in situ nanomechanical testing which requires compact structures.

【 授权许可】

CC BY   
© 2012 by the authors; licensee MDPI, Basel, Switzerland.