Sensors | |
A Comb-Drive Actuator Driven by Capacitively-Coupled-Power | |
Chao-Min Chang2  Shao-Yu Wang1  Rongshun Chen2  J. Andrew Yeh2  | |
[1] Department of Mechanical Engineering, National United University, 1, Lienda, Miaoli 36003, Taiwan; E-Mail:;Institute of NanoEngineering and MicroSystems, National Tsing Hua University, 101, Sec. 2, Kuang-Fu Rd., Hsinchu 30013, Taiwan; E-Mails: | |
关键词: actuation mechanism; capacitive coupling; electrostatic actuators; | |
DOI : 10.3390/s120810881 | |
来源: mdpi | |
【 摘 要 】
This paper presents a new actuation mechanism to drive comb-drive actuators. An asymmetric configuration of the finger overlap was used to generate capacitive coupling for the actuation mechanism. When the driving voltages were applied on the stators, a voltage would be induced at the rotor due to the capacitive coupling. Then, an electrostatic force would be exerted onto the rotor due to the voltage differences between the stators and the rotor. The actuator's static displacement and resonant frequency were theoretically analyzed. To verify the design, a comb-drive actuator with different initial finger overlaps,
【 授权许可】
CC BY
© 2012 by the authors; licensee MDPI, Basel, Switzerland.
【 预 览 】
Files | Size | Format | View |
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RO202003190042514ZK.pdf | 372KB | download |