Development of high-yield fabrication technique for MEMS-PhC devices

IEICE Electronics Express

A. Higo²  H. Toshiyoshi²  Y. Arakawa²  H. Yamada¹  H. Fujita²  M. Tokushima¹  S. Ishida²  S. Iwamoto²  A. Gomyo¹ 

[1] Fundamental and Environmental Research Laboratories, NEC Corporation;Institute of Industrial Science, The University of Tokyo

关键词: optical modulators;    electrostatic actuators;    photonic integrated circuits;    2-dimensinal photonic crystal waveguide;   

DOI  :  10.1587/elex.3.39

学科分类：电子、光学、磁材料

来源: Denshi Jouhou Tsuushin Gakkai

【 摘 要 】

References(9)Cited-By(2)We propose a high-yield fabrication processing technique for the MEMS (micro electro mechanical system) modulators integrated with two-dimensional photonic crystal waveguides. Polysilicon microactuators for evanescent modulation was successfully developed by using the vapor hydrofluoric-acid releasing technique for stiction-free sacrificial release, during which the SOI photonic-crystal waveguides were protected under the LPCVD silicon nitride film. Post-release anneal was found to be needed to remove the byproduct made by the reaction of hydrofluoric acid with silicon nitride film. Preliminary optical modulation result (-2dB modulation with 86V) was experimentally obtained.

【 授权许可】

Unknown