Tunable Sensor Response by Voltage-Control in Biomimetic Hair Flow Sensors

Micromachines

Harmen Droogendijk¹  Christiaan M. Bruinink²  Remco G.P. Sanders² 

[1] MESA+ Institute for Nanotechnology, University of Twente, 7500 AE Enschede, The Netherlands;

关键词: flow sensor;    electrostatic spring softening;    hair;    cricket;    biomimetics;   

DOI  :  10.3390/mi4010116

来源: mdpi

【 摘 要 】

We present an overview of improvements in detection limit and responsivity of our biomimetic hair flow sensors by electrostatic spring-softening (ESS). Applying a DC-bias voltage to our capacitive flow sensors improves the responsively by up to 80% for flow signals at frequencies below the sensor’s resonance. Application of frequency matched AC-bias voltages allows for tunable filtering and selective gain up to 20 dB. Furthermore, the quality and fidelity of low frequency flow measurements can be improved using a non frequency-matched AC-bias voltage, resulting in a flow detection limit down to 5 mm/s at low (30 Hz) frequencies. The merits and applicability of the three methods are discussed.

【 授权许可】

CC BY   
© 2013 by the authors; licensee MDPI, Basel, Switzerland.