Development of a Multi-Channel Piezoelectric Acoustic Sensor Based on an Artificial Basilar Membrane

Sensors

Youngdo Jung¹  Jun-Hyuk Kwak¹  Young Hwa Lee¹  Wan Doo Kim¹ 

[1] Department of Nature-Inspired Nanoconvergence Systems, Korea Institute of Machinery and Materials, 156 Gajeongbuk-ro, Yuseong-gu, Daejeon 304-343, Korea;

关键词: cochlea;    piezoelectric;    microelectromechanical system (MEMS);    artificial basilar membrane (ABM);    laser Doppler vibrometer (LDV);   

DOI  :  10.3390/s140100117

来源: mdpi

【 摘 要 】

In this research, we have developed a multi-channel piezoelectric acoustic sensor (McPAS) that mimics the function of the natural basilar membrane capable of separating incoming acoustic signals mechanically by their frequency and generating corresponding electrical signals. The McPAS operates without an external energy source and signal processing unit with a vibrating piezoelectric thin film membrane. The shape of the vibrating membrane was chosen to be trapezoidal such that different locations of membrane have different local resonance frequencies. The length of the membrane is 28 mm and the width of the membrane varies from 1 mm to 8 mm. Multiphysics finite element analysis (FEA) was carried out to predict and design the mechanical behaviors and piezoelectric response of the McPAS model. The designed McPAS was fabricated with a MEMS fabrication process based on the simulated results. The fabricated device was tested with a mouth simulator to measure its mechanical and piezoelectrical frequency response with a laser Doppler vibrometer and acoustic signal analyzer. The experimental results show that the as fabricated McPAS can successfully separate incoming acoustic signals within the 2.5 kHz–13.5 kHz range and the maximum electrical signal output upon acoustic signal input of 94 dBSPL was 6.33 mVpp. The performance of the fabricated McPAS coincided well with the designed parameters.

【 授权许可】

CC BY   
© 2014 by the authors; licensee MDPI, Basel, Switzerland.