Experiments and Identification of the Unbalance of Aerostatic Guideways on the Micro-Scale

Sensors

Dongju Chen¹  Yanhua Bian² 

[1] College of Mechanical Engineering & Applied Electronics Technology, Beijing University of Technology, Beijing 100124, China;

关键词: unbalance;    gas fluctuation;    aerostatic guideway;    micro-scale;    identification;   

DOI  :  10.3390/s140304416

来源: mdpi

【 摘 要 】

In order to diagnose the unbalance of aerostatic guideways, displacement and acceleration sensors were used to measure the vibration signals of the unbalance of the aerostatic guideways caused by the gas fluctuation. The frequency characteristics for the unbalance of aerostatic guideways caused by gas fluctuation has been extracted from the measured signals by power spectral density, and the basic frequencies of the guideway system have been diagnosed according to spectral characteristics, in agreement with the results calculated by the corresponding motion equations and the finite element method.

【 授权许可】

CC BY   
© 2014 by the authors; licensee MDPI, Basel, Switzerland.