A Harsh Environment-Oriented Wireless Passive Temperature Sensor Realized by LTCC Technology

Sensors

Qiulin Tan¹  Tao Luo¹  Jijun Xiong¹  Hao Kang¹  Xiaxia Ji¹  Yang Zhang¹  Mingliang Yang¹  Xiaolong Wang¹  Chenyang Xue¹  Jun Liu¹ 

[1] Key Laboratory of Instrumentation Science & Dynamic Measurement, Ministry of Education, North University of China, Tai Yuan 030051, China;

关键词: temperature sensor;    LTCC;    harsh environments;    ferroelectric dielectric material;    wireless passive;   

DOI  :  10.3390/s140304154

来源: mdpi

【 摘 要 】

To meet measurement needs in harsh environments, such as high temperature and rotating applications, a wireless passive Low Temperature Co-fired Ceramics (LTCC) temperature sensor based on ferroelectric dielectric material is presented in this paper. As a LC circuit which consists of electrically connected temperature sensitive capacitor and invariable planar spiral inductor, the sensor has its resonant frequency shift with the variation in temperature. Within near-filed coupling distance, the variation in resonant frequency of the sensor can be detected contactlessly by extracting the impedance parameters of an external antenna. Ferroelectric ceramic, which has temperature sensitive permittivity, is used as the dielectric. The fabrication process of the sensor, which differs from conventional LTCC technology, is described in detail. The sensor is tested three times from room temperature to 700 °C, and considerable repeatability and sensitivity are shown, thus the feasibility of high performance wireless passive temperature sensor realized by LTCC technology is demonstrated.

【 授权许可】

CC BY   
© 2014 by the authors; licensee MDPI, Basel, Switzerland.