Novel Piezoelectric Effect and Surface Plasmon Resonance-Based Elements for MEMS Applications

Sensors

Sigita Ponelyte¹ 

关键词: piezoelectric effect;    surface plasmon resonance;    silver;    tunable;    periodical microstructure;   

DOI  :  10.3390/s140406910

来源: mdpi

【 摘 要 】

This paper covers research on novel thin films with periodical microstructure—optical elements, exhibiting a combination of piezoelectric and surface plasmon resonance effects. The research results showed that incorporation of Ag nanoparticles in novel piezoelectric—plasmonic elements shift a dominating peak in the visible light spectrum. This optical window is essential in the design of optical elements for sensing systems. Novel optical elements can be tunable under defined bias and change its main grating parameters (depth and width) influencing the response of diffraction efficiencies. These elements allow opening new avenues in the design of more sensitive and multifunctional microdevices.

【 授权许可】

CC BY   
© 2014 by the authors; licensee MDPI, Basel, Switzerland.