A Low-Power Integrated Humidity CMOS Sensor by Printing-on-Chip Technology

Sensors

Chang-Hung Lee²  Wen-Yu Chuang²  Melissa A. Cowan³  Wen-Jung Wu¹ 

[1] Department of Engineering Science and Ocean Engineering, National Taiwan University, Taipei 10617, Taiwan; E-Mail:;Graduate Institute of Electronics Engineering, National Taiwan University, Taipei 10617, Taiwan; E-Mails:;Intel Lab, Hillsboro, OR 97124, USA; E-Mail:

关键词: sensor integration;    inkjet printing;    gas sensor;   

DOI  :  10.3390/s140509247

来源: mdpi

【 摘 要 】

A low-power, wide-dynamic-range integrated humidity sensing chip is implemented using a printable polymer sensing material with an on-chip pulse-width-modulation interface circuit. By using the inkjet printing technique, poly(3,4-ethylene-dioxythiophene)/polystyrene sulfonate that has humidity sensing features can be printed onto the top metal layer of a 0.35 μm CMOS IC. The developed printing-on-chip humidity sensor achieves a heterogeneous three dimensional sensor system-on-chip architecture. The humidity sensing of the implemented printing-on-chip sensor system is experimentally tested. The sensor shows a sensitivity of 0.98% to humidity in the atmosphere. The maximum dynamic range of the readout circuit is 9.8 MΩ, which can be further tuned by the frequency of input signal to fit the requirement of the resistance of printed sensor. The power consumption keeps only 154 μW. This printing-on-chip sensor provides a practical solution to fulfill an ultra-small integrated sensor for the applications in miniaturized sensing systems.

【 授权许可】

CC BY   
© 2014 by the authors; licensee MDPI, Basel, Switzerland.