Micromachines | |
Novel SU-8/Ionic Liquid Composite for Tribological Coatings and MEMS | |
Leili Batooli2  Sandra Guadalupe Maldonado2  Moshe Judelewicz1  Stefano Mischler2  | |
[1] Gersteltec Sàrl, Avenue Général-Guisan 26, CH-1009 Pully, Switzerland; E-Mail:;Tribology and Interface Chemistry Group (SCI-STI-SM), Ecole Polytechnique Fédérale de Lausanne (EPFL), CH-1015 Lausanne, Switzerland; E-Mails: | |
关键词: SU-8; tribology; ionic liquid; composite; MEMS; | |
DOI : 10.3390/mi6050611 | |
来源: mdpi | |
【 摘 要 】
Tribology of SU-8 polymer is increasingly relevant due to bursting use of this material in a variety of applications. This study is directed towards introduction and investigation of a novel self-lubricating composite of an ionic liquid (IL) in SU-8. The new material can be utilized for fabrication of lubricating polymer coating with tunable surface properties or SU8-made elements for microelectromechanical systems (MEMS) with enhanced tribological performance. It is shown that addition of IL drastically alters water affinity of the composite while UV patternability remains unmodified. A lower coefficient of friction and wear has been obtained for two investigated compositions with 4 and 10 wt % ionic liquid.
【 授权许可】
CC BY
© 2015 by the authors; licensee MDPI, Basel, Switzerland.
【 预 览 】
Files | Size | Format | View |
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RO202003190012323ZK.pdf | 5223KB | download |