A Meliorated Multi-Frequency Band Pyroelectric Sensor

Sensors

Chun-Ching Hsiao²  Sheng-Yi Liu²  An-Shen Siao¹ 

[1] Department of Mechanical Engineering, National Taiwan University of Science and Technology, No. 43, Keelung Rd., Sec. 4, Taipei 10607, Taiwan; E-Mail:;Department of Mechanical Design Engineering, National Formosa University, No. 64, Wunhua Rd., Huwei Township, Yunlin County 632, Taiwan; E-Mail:

关键词: pyroelectric sensor;    multi-frequency;    zinc oxide;    aerosol deposition;   

DOI  :  10.3390/s150716248

来源: mdpi

【 摘 要 】

This article proposes a meliorated multi-frequency band pyroelectric sensor for detecting subjects with various velocities, namely extending the sensing frequency under good performance from electrical signals. A tactic, gradually increasing thickness of the ZnO layers, is used for redeeming drawbacks of a thicker pyroelectric layer with a tardy response at a high-frequency band and a thinner pyroelectric layer with low voltage responsivity at a low-frequency band. The proposed sensor is built on a silicon substrate with a thermal isolation layer of a silicon nitride film, consisting of four pyroelectric layers with various thicknesses deposited by a sputtering or aerosol deposition (AD) method and top and bottom electrodes. The thinnest ZnO layer is deposited by sputtering, with a low thermal capacity and a rapid response shoulders a high-frequency sensing task, while the thicker ZnO layers are deposited by AD with a large thermal capacity and a tardy response shoulders a low-frequency sensing task. The fabricated device is effective in the range of 1 KHz~10 KHz with a rapid response and high voltage responsivity, while the ZnO layers with thicknesses of about 0.8 μm, 6 μm, 10 μm and 16 μm are used for fabricating the meliorated multi-frequency band pyroelectric sensor. The proposed sensor is successfully designed, analyzed, and fabricated in the present study, and can indeed extend the sensing range of the multi-frequency band.

【 授权许可】

CC BY   
© 2015 by the authors; licensee MDPI, Basel, Switzerland.