Fabrication and Characterization of a Micro Methanol Sensor Using the CMOS-MEMS Technique

Sensors

Chien-Fu Fong¹  Ching-Liang Dai¹  Chyan-Chyi Wu² 

[1] Department of Mechanical Engineering, National Chung Hsing University, Taichung 402, Taiwan; E-Mail:;Department of Mechanical and Electro-Mechanical Engineering, Tamkang University, Tamsui 251, Taiwan; E-Mail:

关键词: methanol sensor;    tin dioxide;    cadmium sulfide;    heater;   

DOI  :  10.3390/s151027047

来源: mdpi

【 摘 要 】

A methanol microsensor integrated with a micro heater manufactured using the complementary metal oxide semiconductor (CMOS)-microelectromechanical system (MEMS) technique was presented. The sensor has a capability of detecting low concentration methanol gas. Structure of the sensor is composed of interdigitated electrodes, a sensitive film and a heater. The heater located under the interdigitated electrodes is utilized to provide a working temperature to the sensitive film. The sensitive film prepared by the sol-gel method is tin dioxide doped cadmium sulfide, which is deposited on the interdigitated electrodes. To obtain the suspended structure and deposit the sensitive film, the sensor needs a post-CMOS process to etch the sacrificial silicon dioxide layer and silicon substrate. The methanol senor is a resistive type. A readout circuit converts the resistance variation of the sensor into the output voltage. The experimental results show that the methanol sensor has a sensitivity of 0.18 V/ppm.

【 授权许可】

CC BY   
© 2015 by the authors; licensee MDPI, Basel, Switzerland.