Sensors | |
Micro Ethanol Sensors with a Heater Fabricated Using the Commercial 0.18 μm CMOS Process | |
Wei-Zhen Liao2  Ching-Liang Dai1  | |
[1]Department of Mechanical Engineering, National Chung Hsing University, Taichung 402, Taiwan | |
关键词: ethanol sensor; zinc oxide film; heater; post-process; | |
DOI : 10.3390/s131012760 | |
来源: mdpi | |
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【 摘 要 】
The study investigates the fabrication and characterization of an ethanol microsensor equipped with a heater. The ethanol sensor is manufactured using the commercial 0.18 μm complementary metal oxide semiconductor (CMOS) process. The sensor consists of a sensitive film, a heater and interdigitated electrodes. The sensitive film is zinc oxide prepared by the sol-gel method, and it is coated on the interdigitated electrodes. The heater is located under the interdigitated electrodes, and it is used to supply a working temperature to the sensitive film. The sensor needs a post-processing step to remove the sacrificial oxide layer, and to coat zinc oxide on the interdigitated electrodes. When the sensitive film senses ethanol gas, the resistance of the sensor generates a change. An inverting amplifier circuit is utilized to convert the resistance variation of the sensor into the output voltage. Experiments show that the sensitivity of the ethanol sensor is 0.35 mV/ppm.
【 授权许可】
CC BY
© 2013 by the authors; licensee MDPI, Basel, Switzerland.
【 预 览 】
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RO202003190033539ZK.pdf | 981KB | ![]() |