Design and Performance of a Focus-Detection System for Use in Laser Micromachining

Micromachines

Binh Xuan Cao¹  Munju Bae¹  Hyonkee Sohn¹  Jiyeon Choi¹  Youngduk Kim²  Jeng-o Kim¹  Jiwhan Noh¹ 

[1]Department of Laser and Electron Beam Application, Korea Institute of Machinery & Materials (KIMM), Daejeon 34103, Korea

[2]Department of Mechanical Engineering, Korea Advanced Institute of Science and Technology (KAIST), Daejeon 34141, Korea

关键词: detection of focal position;    focal position;    laser micromachining;   

DOI  :  10.3390/mi7010002

来源: mdpi

【 摘 要 】

We describe a new approach for locating the focal position in laser micromachining. This approach is based on a feedback system that uses a charge-coupled device (CCD) camera, a beam splitter, and a mirror to focus a laser beam on the surface of a work piece. We tested the proposed method for locating the focal position by using Zemax simulations, as well as physically carrying out drilling processes. Compared with conventional methods, this approach is advantageous because: the implementation is simple, the specimen can easily be positioned at the focal position, and the dynamically adjustable scan amplitude and the CCD camera can be used to monitor the laser beam’s profile. The proposed technique will be particularly useful for locating the focal position on any surface in laser micromachining.

【 授权许可】

CC BY   
© 2016 by the authors; licensee MDPI, Basel, Switzerland.