The model developed for stress-induced structural phase transformations of micro-crystalline silicon films

Nano-Micro Letters

Jen-Fin Lin¹  Chang-Fu Han¹ 

关键词: Silicon films;    Phase transitions;    Stress-strain model;   

DOI  :  10.5101/nml.v2i2.p68-73

来源: Open Access House of Science and Technology

【 摘 要 】

Thenanoindentationswereappliedtoisland-shapedregionswithmetal-inducedSicrystallizations.Theexperimentalstress-strainrelationshipisobtainedfromtheload-depthprofileinordertoinvestigatethecriticalstressesarisingatvariousphasetransitions.ThestressandstrainvaluesatvariousindentationdepthsareappliedtodeterminetheGibbsfreeenergyatvariousphases.TheintersectionsoftheGibbsfreeenergylinesareusedtodeterminethepossiblepathsofphasetransitionsarisingatvariousindentationdepths.Allthecriticalcontactstressescorrespondingtothevariousphasetransitionsatfourannealingtemperatureswerefoundtobeconsistentwiththeexperimentalresults.

【 授权许可】

Unknown