100-MHz ultrasonic linear array transducers based on polyurea-film

Acoustical Science and Technology

Takahiro Aoyagi¹  Masaya Tabaru²  Toshiki Takayasu²  Marie Nakazawa²  Kentaro Nakamura² 

[1] Graduate School of Decision Science and Technology, Tokyo Institute of Technology;Precision and Intelligence Laboratory, Tokyo Institute of Technology

关键词: Polyurea film;    Piezoelectric polymer;    High-frequency;    Ultrasonic array transducer;    Phased array;    Lithography;   

DOI  :  10.1250/ast.36.139

学科分类：声学和超声波

来源: Acoustical Society of Japan

【 摘 要 】

References(45)Eight- and 32-element ultrasonic array transducers using polyurea films are fabricated and experimentally tested in this study. Aromatic polyurea thin films, prepared by vapor deposition polymerization, are suitable for use as an ultrasonic transducer. In this paper, we present two types of polyurea array transducer with 20 and 200 μm pitches. The polyurea films were prepared through vapor deposition polymerization, and miniature electrode arrays were fabricated by a lithographic technique. Resonance frequencies of approximately 30, 65, and 100 MHz were observed in the electrical admittance. To examine the performances of the prototype array transducers, a pulse/echo test and phased array experiment were performed. From the experimental results, we found that the polyurea array transducers fabricated by the proposed method correctly operated as expected.

【 授权许可】

Unknown