High speed, high resolution ultrasonic linear motor using V-shape two bolt-clamped Langevin-type transducers

Acoustical Science and Technology

Minoru Kuribayashi Kurosawa¹  Takeshi Fujimura²  Ryouichi Fukunaga²  Kazumasa Asumi² 

[1] Tokyo Institute of Technology;Taiheiyo-Cement Corporation

关键词: Ultrasonic motor;    Langevin-type transducer;    Resolution;    Speed;   

DOI  :  10.1250/ast.30.180

学科分类：声学和超声波

来源: Acoustical Society of Japan

【 摘 要 】

References(11)Cited-By(17)An ultrasonic motor using two bolt-clamped Langevin-type transducers was described. A rigorous optimization of the motor’s structure was conducted and its results are reported in regard to various motor parameters. Based on FEM analysis and experimental results it was established that symmetric and anti-symmetric resonance frequencies could be matched by adjusting the mass of the tip of the motor’s head block. The driving voltage of the motor was reduced by using stacked multi-layered piezo-elements. The velocity of the motor fabricated in this study was more than 1.5 m/s and 25 N in a condition. However, a velocity of less than 100 mm/s could not be achieved using conventional resonance driving. In the case of a velocity lower than 1 mm/s, driving was achieved by “inertial driving.” 1.5 nm resolution was observed using DC driving.

【 授权许可】

Unknown