Micro-patterning of Lead Zirconate Titanate Thin Films Seeded with Barium Strontium Titanate Nano-crystalline Particles by Photo-irradiation

JOURNAL OF CHEMICAL ENGINEERING OF JAPAN

Mikio Konno²  Yoshio Kobayashi²  Akira Watanabe¹  Tomokazu Tanase²  Takao Miwa³ 

[1] Institute of Multidisciplinary Research for Advanced Materials, Tohoku University;Department of Chemical Engineering, Graduate School of Engineering, Tohoku University;Hitachi Research Laboratory, Hitachi, Ltd.

关键词: Lead Zirconate Titanate;    Barium Strontium Titanate;    Nano-Crystalline Particle;    Photo-Irradiation;    Micro-Patterning;   

DOI  :  10.1252/jcej.37.609

来源: Maruzen Company Ltd

【 摘 要 】

References(10)Lead zirconate titanate (PZT) thin films seeded with barium strontium titanate (BST) nano-crystalline particles were fabricated on a Si wafer with a spin-coating technique. The BST particles synthesized with a sol-gel method were dispersed in an acetylacetone (chelating reagent) modified PZT precursor solution of complex alkoxides for the fabrication. The micro-patterns of the PZT film containing 50 mol% BST particles could be obtained by the direct photo-irradiation to the fabricated films for 40 min without any pre-heating treatments, while the PZT films in the absence of the BST particles required pre-heating treatment at 200°C for 10 s before the photo-irradiation. This suggested that the BST crystallines accelerated decomposition of the chelate compounds and subsequent polycondensation of PZT alkoxides.

【 授权许可】

Unknown