An Optical Method to Detect Amount of Particles Deposited on a Substrate

JOURNAL OF CHEMICAL ENGINEERING OF JAPAN

Kimihiko Yasumura¹  Ko Higashitani¹  Takamasa Maki¹ 

[1] Department of Chemical Engineering, Kyoto University

关键词: Particle Deposition;    Clean Surface;    Reflectometry;    Laser Beam;    Measuring Apparatus;   

DOI  :  10.1252/jcej.28.501

来源: Maruzen Company Ltd

【 摘 要 】

References(10)It is examined whether the principle of reflectometry, developed to measure the thickness of a thin layer on a surface, is applicable to detecting quantitatively the amount of fine particles deposited on a substrate. It is found that the relative difference of parallel and perpendicular components of the laser beam reflected on the surface is proportional to the particle coverage if experimental conditions are suitably selected, and that this principle is able to be used to detect with high sensitivity in-situ the amount of particles.

【 授权许可】

Unknown