Performance of the post-focusing mirror system at the reflectometry beamline BL-11D of the Photon Factory

11th International Conference on X-ray Microscopy

Hatano, Tadashi^1 ; Aihara, Shogaku^1 ; Uchida, Kentaro^1 ; Tsuru, Toshihide^1

IMRAM, Tohoku University, 2-1-1 Katahira, Aoba-ku, Sendai 980-8577, Japan^1

关键词: Elliptical mirrors;    Extreme Ultraviolet;    Focusing mirrors;    Microscope optics;    Optical components;    Reflectometry;    Sample surface;    Spherical aberrations;   

Others  :  https://iopscience.iop.org/article/10.1088/1742-6596/463/1/012010/pdf
DOI  :  10.1088/1742-6596/463/1/012010

来源: IOP

【 摘 要 】

Beamline BL-11D of the Photon Factory was recently opened for the characterization of extreme-ultraviolet and soft X-ray optical components. For reflectometry of multilayers for soft X-ray microscope optics, a small focus size on the sample surface matching the small acceptances of the curved multilayer samples is required. The post-focusing mirror system of BL-11D is composed of horizontally and vertically focusing elliptical mirrors. The performance was evaluated by microscopic beam profile observation, by a knife-edge scan test, and by the Ronchi test. The FWHM beam size was 120 μm (H) × 30 μm (V) with an insignificant spherical aberration, which is smaller than the requirement.