STUDY ON THE SPATIAL GENERATION OF BREAKDOWN SPOTS IN MIM CAPACITORS WITH DIFFERENT ASPECT RATIOS

Facta Universitatis, Series: Electronics and Energetics

Andrea Irace²  Xavier Saura¹  Michele Riccio²  Jordi Suñé¹  Enrique Miranda¹  Giuseppe De Falco² 

[1]Department d'Enginyeria Electronica, University of Barcelona$$

[2]Department of Electrical Engineering and Information Technologies, University of Naples Federico II, Via Claudio 21, 80125 Naples, Italy$$

关键词: analytically extended function;    lightning current derivative;    lightning current function;    lightning stroke;    Marquardt least-squares method;   

DOI  :  

来源: University of Nis

【 摘 要 】

Metal-insulator-metal (MIM) large area (>10 -4 cm 2 ) capacitors with different aspect ratios were subjected to severe stress conditions ( E ox >4-5 MV/cm) with the objective of generating a large density of breakdown spots (from 10 5 to 10 6 spots/cm 2 ) in the same device. The resulting mark pattern on the top metal electrode associated with the failure events wasanalyzed first using conventional functional estimators for two-dimensional spatial statistics. Second, as a double check, the attention was focused on the same breakdown spot patterns but in relation to the probe point location. In this latter case, the objective was to ruled outany stochastic dependence of the breakdown spot distributionon the position of the source of degradation and therefore to confirm whether or not the spots follow a complete spatial randomness ( CSR ) process. In order to simplify the mathematical treatmentof the point-to-event distributions, the voltage probe was assumed to be located at one corner of the observation window which significantlyreduces the number of cases to analyze. Infrarred images revealed that the generation of the spots is associated with micro-explosions within the insulating material and with the local volatilization of the top metal electrode.

【 授权许可】

Unknown