Microwave power coupling with electron cyclotron resonance plasma using Langmuir probe

Pramana

V K Senecha¹  S K Jain1¹  P R Hannurkar¹  P A Naik¹  S C Joshi¹ 

[1] Raja Ramanna Centre for Advanced Technology, Indore 452 013, India$$

关键词: Electron cyclotron resonance plasma;    Langmuir probe;    electron density;    electron temperature.;   

DOI  :  

学科分类：物理（综合）

来源: Indian Academy of Sciences

【 摘 要 】

Electron cyclotron resonance (ECR) plasma was produced at 2.45 GHz using 200 – 750 W microwave power. The plasma was produced from argon gas at a pressure of 2 × 10−4 mbar. Three water-cooled solenoid coils were used to satisfy the ECR resonant conditions inside the plasma chamber. The basic parameters of plasma, such as electron density, electron temperature, floating potential, and plasma potential, were evaluated using the current–voltage curve using a Langmuir probe. The effect of microwave power coupling to the plasma was studied by varying the microwave power. It was observed that the optimum coupling to the plasma was obtained for ∼ 600 W microwave power with an average electron density of ∼ 6 × 1011 cm−3 and average electron temperature of ∼ 9 eV.

【 授权许可】

Unknown