Influence of growth conditions on microstructure and defects in diamond coatings grown by microwave plasma enhanced CVD

Bulletin of materials science

Bichitra K Guha²  Nandadulal Dandapat¹  Awadesh Kumar Mallik¹  Kalyan Sundar Pal³  Sandip Bysakh¹  Someswar Datta¹ 

[1] Central Glass & Ceramic Research Institute, Kolkata 700 032, West Bengal, India$$Central Glass & Ceramic Research Institute, Kolkata 700 032, West Bengal, IndiaCentral Glass & Ceramic Research Institute, Kolkata 700 032, West Bengal, India$$;Department of Physics, Indian Institute of Engineering Science and Technology, Howrah 711 103, India$$Department of Physics, Indian Institute of Engineering Science and Technology, Howrah 711 103, IndiaDepartment of Physics, Indian Institute of Engineering Science and Technology, Howrah 711 103, India$$;Central Glass & Ceramic Research Institute, Kolkata 700 032, West Bengal, India$$Department of Physics, Indian Institute of Engineering Science and Technology, Howrah 711 103, India$$National Test House (ER), Kolkata 700 091, India$$Central Glass & Ceramic Research Institute, Kolkata 700 032, West Bengal, IndiaCentral Glass & Ceramic Research Institute, Kolkata 700 032, West Bengal, India$$Department of Physics, Indian Institute of Engineering Science and Technology, Howrah 711 103, India$$National Test House (ER), Kolkata 700 091, India$$Department of Physics, Indian Institute of Engineering Science and Technology, Howrah 711 103, IndiaCentral Glass & Ceramic Research Institute, Kolkata 700 032, West Bengal, India$$Department of Physics, Indian Institute of Engineering Science and Technology, Howrah 711 103, India$$National Test House (ER), Kolkata 700 091, India$$National Test House (ER), Kolkata 700 091, IndiaCentral Glass & Ceramic Research Institute, Kolkata 700 032, West Bengal, India$$Department of Physics, Indian Institute of Engineering Science and Technology, Howrah 711 103, India$$National Test House (ER), Kolkata 700 091, India$$

关键词: Microwave plasma CVD;    polycrystalline diamond;    transmission electron microscopy;    microstructure;    defects.;   

DOI  :  

学科分类：材料工程

来源: Indian Academy of Sciences

【 摘 要 】

Diamond coatings were grown on SiO₂/Si substrate under various process conditions by microwave plasma chemical vapour deposition (MPCVD) using CH₄/H₂ gas mixture. In this paper, we present a microstructural study to elucidate on the growth mechanism and evolution of defects, viz., strain, dislocations, stacking faults, twins and non-diamond impurities in diamond coatings grown under different process conditions. Transmission electron microscopy (TEM), X-ray diffraction (XRD) and Raman spectroscopy were used to characterize the diamond coatings. It has been shown that our new approach of prolonged substrate pre-treatment under hydrogen plasma yielded a new growth sequence that the SiO₂ layer on the Si substrate was first reduced to yield Si layer of ∼150 nm thickness before diamond was allowed to grow under CH₄â€�?�H₂ plasma, created subsequently. It has also been shown that Si and O as impurity from the substrate hinders the initial diamond growth to yield non-diamond phases. It is being suggested that the crystal defects like twins, stacking faults, dislocations in the diamond grains and dislocations in the intermediate Si layer are generated due to the development of non-uniform stresses during diamond growth at high temperature.

【 授权许可】

Unknown