Microscopic properties of MPCVD diamond coatings studied by micro-Raman and micro-photoluminescence spectroscopy

Bulletin of materials science

Bichitra K Guha⁴  Nandadulal Dandapat²  Nihar R Ray¹  Sandip Bysakh²  Kalyan S Pal³  Awadesh K Mallik²  Someswar Datta² 

[1] Centre for Nano Science and Surface Physics, Surface Physics Division, Saha Institute of Nuclear Physics, 1/AF, Bidhannagar, Kolkata 700 064, India$$Centre for Nano Science and Surface Physics, Surface Physics Division, Saha Institute of Nuclear Physics, 1/AF, Bidhannagar, Kolkata 700 064, IndiaCentre for Nano Science and Surface Physics, Surface Physics Division, Saha Institute of Nuclear Physics, 1/AF, Bidhannagar, Kolkata 700 064, India$$;CSIR â€�?? Central Glass & Ceramics Research Institute, Kolkata 700 032, India$$CSIR â€�?? Central Glass & Ceramics Research Institute, Kolkata 700 032, IndiaCSIR â€�?? Central Glass & Ceramics Research Institute, Kolkata 700 032, India$$;CSIR â€�?? Central Glass & Ceramics Research Institute, Kolkata 700 032, India$$Department of Physics, Indian Institute Engineering Science & Technology, Howrah 711 103, India$$CSIR â€�?? Central Glass & Ceramics Research Institute, Kolkata 700 032, IndiaCSIR â€�?? Central Glass & Ceramics Research Institute, Kolkata 700 032, India$$Department of Physics, Indian Institute Engineering Science & Technology, Howrah 711 103, India$$Department of Physics, Indian Institute Engineering Science & Technology, Howrah 711 103, IndiaCSIR â€�?? Central Glass & Ceramics Research Institute, Kolkata 700 032, India$$Department of Physics, Indian Institute Engineering Science & Technology, Howrah 711 103, India$$;Department of Physics, Indian Institute Engineering Science & Technology, Howrah 711 103, India$$Department of Physics, Indian Institute Engineering Science & Technology, Howrah 711 103, IndiaDepartment of Physics, Indian Institute Engineering Science & Technology, Howrah 711 103, India$$

关键词: Raman spectroscopy;    photoluminescence;    diamond;    transmission electron microscopy.;   

DOI  :  

学科分类：材料工程

来源: Indian Academy of Sciences

【 摘 要 】

Diamond coatings were deposited on silicon (100) substrate using the microwave plasma chemical vapour deposition (MPCVD) technique at different process conditions. Process parameters such as CH₄â€�?�H₂ gas mixture concentration, microwave power, chamber pressure and substrate temperature were varied. The diamond coatings were characterized by micro-Raman and micro-photoluminescence (PL) spectroscopy techniques. In this paper we report a comparison of the overall quality of MPCVD polycrystalline diamond coatings grown under different processing conditions in terms of stress distribution, thickness uniformity and surface roughness. Micro-Raman spectroscopy studies over various points on the deposited coating showed that the Raman line widths of diamond peak varied from 3.2 to 18.3 cm^âˆ�?1 with the variation of CH₄ and H₂ gas concentration. The micro-PL spectra suggested the presence of impurity concentration and defects within the diamond coating synthesized at different processing conditions. Transmission electron microscopy (TEM) images provide the direct evidence of the presence of crystal defects which corroborates the Raman and PL results. The coherence scanning interferometry (CSI) showed that surface roughness of diamond coating varied from 0.43 to 11 𝜇m with thickness at different positions of the three coating samples. It has been concluded that Raman line-width broadening and Raman-shift are due to the presence of crystal defects as well as non-uniform distribution of stresses present in the diamond crystals of the coating, due to the incorporation of Si as impurity element and non-uniform temperature distribution during growth. Defect density gets reduced at higher processing temperatures. It is also being proposed that better thickness uniformity and lower surface roughness can be achieved for coatings deposited at low methane concentration under optimized process conditions.

【 授权许可】

Unknown