Influence of different heat treatment programs on properties of sol�?�gel synthesized (Na0.5K0.5)NbO3 (KNN) thin films

Bulletin of materials science

W Ensinger¹  S Wiegand¹  O Baake¹  S Flege¹ 

[1] Department of Materials and Geosciences, Materials Analysis Group, Technische Universität Darmstadt, Petersenstrasse 23, 64287 Darmstadt, Germany$$Department of Materials and Geosciences, Materials Analysis Group, Technische Universität Darmstadt, Petersenstrasse 23, 64287 Darmstadt, GermanyDepartment of Materials and Geosciences, Materials Analysis Group, Technische Universität Darmstadt, Petersenstrasse 23, 64287 Darmstadt, Germany$$

关键词: Solâ€�?�gel;    ferroelectric;    electrical properties;    thin film;    perovskite;    lead-free.;   

DOI  :  

学科分类：材料工程

来源: Indian Academy of Sciences

【 摘 要 】

Thin films of (Na_0.5K_0.5)NbO₃ (KNN) were synthesized on Pt/Ti/SiO₂/Si substrates with repeated spin-coating after fabrication of the precursor solution by a solâ€�?�gel process. The KNN precursor solution was prepared from K- and Na-acetate, Nb-pentaethoxide and 1,3-propanediol. Based on three characteristic temperatures derived from thermal analysis (TGâ€�?�DTA) experiments, five heat treatment programs were developed. All programs lead to single phase perovskite KNN films with random crystal orientation, but only the programs that included a treatment after each single spin-coating step provided pore free surfaces with grains of about 100 nm size. The lowest leakage current at 150 kV cm^-1 was obtained for the temperature program that included pyrolysis and calcination steps after each deposited layer.

【 授权许可】

Unknown