Photonic crystal waveguides by direct writing of e-beam on self-assembled photonic crystals

Bulletin of materials science

R Vijaya¹  Sunita Kedia¹ 

[1] Department of Physics, Indian Institute of Technology Bombay, Mumbai 400 076, India$$Department of Physics, Indian Institute of Technology Bombay, Mumbai 400 076, IndiaDepartment of Physics, Indian Institute of Technology Bombay, Mumbai 400 076, India$$

关键词: Photonic crystals;    waveguides;    electron beam lithography.;   

DOI  :  

学科分类：材料工程

来源: Indian Academy of Sciences

【 摘 要 】

Direct electron beam lithography technique is used for writing a variety of waveguide structures on thin films of polymethyl methacrylate (PMMA) and self-assembled three-dimensionally ordered photonic crystals made up of PMMA colloidal spheres. The waveguide structures fabricated on both these type of samples are characterized by scanning electron microscope and optical microscope images.

【 授权许可】

Unknown