Influence of radio frequency power on structure and ionic conductivity of LiPON thin films

Bulletin of materials science

Kai Xie¹  Dezhan Li¹  Zongqian Hu¹ 

[1] College of Aerospace and Materials Engineering, National University of Defense Technology, Changsha Hunan 410073, P R China$$College of Aerospace and Materials Engineering, National University of Defense Technology, Changsha Hunan 410073, P R ChinaCollege of Aerospace and Materials Engineering, National University of Defense Technology, Changsha Hunan 410073, P R China$$

关键词: LiPON;    solid state electrolyte;    thin films;    radio frequency power.;   

DOI  :  

学科分类：材料工程

来源: Indian Academy of Sciences

【 摘 要 】

Lithium phosphorus oxynitride (LiPON) thin films as solid electrolytes were prepared by radio frequency magnetron sputtering of a Li₃PO₄ target in ambient nitrogen atmosphere. The influence of radio frequency (rf) power on the structure and the ionic conductivity of LiPON thin films has been investigated. The morphology, composition, structure and ionic conductivity of thin films were characterized by scanning electron microscopy, energy dispersive spectroscopy, X-ray diffraction, X-ray photoelectron spectroscopy and a.c. impedance measurement. It was found that ionic conductivity of LiPON thin films increases with N content in thin films. XPS measurements reveal that ionic conductivity also keeps relativity with the structure of thin films. Higher the ð‘�?_t/ð‘�?_d ratio, higher will be the ionic conductivity of LiPON thin films. And both of them can be improved by increasing rf power from 1.5 W/cm2 to 5.5 W/cm².

【 授权许可】

Unknown