A high-order sigma-delta accelerometer interface circuit

IEICE Electronics Express

Mingyuan Ren¹  Xiaowei Liu¹  Weiping Chen¹  Xiangyu Li¹ 

[1] MEMS center, Harbin Institute of Technology

关键词: high-order;    sigma-delta;    accelerometer;    interface circuit;   

DOI  :  10.1587/elex.12.20141035

学科分类：电子、光学、磁材料

来源: Denshi Jouhou Tsuushin Gakkai

【 摘 要 】

References(10)Cited-By(2)A high-order high-Q closed-loop sigma-delta (ΣΔ) capacitive microaccelerometer interface circuit is presented in this work. The quantization noise in baseband of the interface circuit is greatly suppressed by a high-order loop shaping, and the mechanical noise is deceased by the use of a vacuum-packaged sensor element. A lead compensator is used to damp the high-Q element to guarantee a stable high-order system. The interface circuit is implemented in a standard CMOS process, and the power dissipation is 10 mW from a 5 V supply and sampling frequency of 250 kHz. The high-order high-Q closed-loop ΣΔ capacitive microaccelerometer has a noise floor of 5 µg/Hz1/2 with bandwidth of 600 Hz.

【 授权许可】

Unknown