IEICE Electronics Express | |
A high-order sigma-delta accelerometer interface circuit | |
Mingyuan Ren1  Xiaowei Liu1  Weiping Chen1  Xiangyu Li1  | |
[1] MEMS center, Harbin Institute of Technology | |
关键词: high-order; sigma-delta; accelerometer; interface circuit; | |
DOI : 10.1587/elex.12.20141035 | |
学科分类:电子、光学、磁材料 | |
来源: Denshi Jouhou Tsuushin Gakkai | |
【 摘 要 】
References(10)Cited-By(2)A high-order high-Q closed-loop sigma-delta (ΣΔ) capacitive microaccelerometer interface circuit is presented in this work. The quantization noise in baseband of the interface circuit is greatly suppressed by a high-order loop shaping, and the mechanical noise is deceased by the use of a vacuum-packaged sensor element. A lead compensator is used to damp the high-Q element to guarantee a stable high-order system. The interface circuit is implemented in a standard CMOS process, and the power dissipation is 10 mW from a 5 V supply and sampling frequency of 250 kHz. The high-order high-Q closed-loop ΣΔ capacitive microaccelerometer has a noise floor of 5 µg/Hz1/2 with bandwidth of 600 Hz.
【 授权许可】
Unknown
【 预 览 】
Files | Size | Format | View |
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RO201911300536385ZK.pdf | 1544KB | download |