Design of a compact low pass filter for high power RF generators

IEICE Electronics Express

Jaesu Park¹  Jaehoon Choi¹ 

[1] Department of Electrical and Computer Engineering, Hanyang University

关键词: RF generator;    low pass filter;    high power;    capacitor/inductor;    compact design;   

DOI  :  10.1587/elex.10.20120956

学科分类：电子、光学、磁材料

来源: Denshi Jouhou Tsuushin Gakkai

【 摘 要 】

References(6)The low-pass filter (LPF) is a key component for high power RF generators generating 40.68MHz sine wave, since the LPF should reject harmonic noises and handle high input power simultaneously. We propose a novel LPF, operating at 30kW with good skirt performance. The proposed filter is a 7th order Butterworth type and consists of four capacitors and three inductors. The capacitors and inductors are implemented by copper plates, teflon insulators and copper plates with screws, respectively. The measured values of S11, S21 and phase of the proposed LPF are −26.4dB, −0.57dB, and −163.5 degrees at 40.68MHz, respectively. The S21 values at 2nd (81.36MHz) and 3rd (122.04MHz) harmonics are −19.5dB and −29.3dB, respectively. The measured spectrum data on the surface of RF cable that is connected to the LPF output were −41.0dBm at 40.68MHz and −78.8dBm at 81.36MHz. The difference value of 37.8dB is sufficient for harmonic suppression. In addition, arcing and thermal problems do not occur.

【 授权许可】

Unknown