Reliable Compact Models for the Investigation of Acoustic High-Frequency Effects in MEMS Transducers

Proceedings

Krumbein, Ulrich¹  Manz, Johannes²  Bosetti, Gabriele³  Schrag, Gabriele⁴ 

[1] Author to whom correspondence should be addressed.;Infineon Technologies AG, 85579 Neubiberg, Germany;Institute for Physics of Electrotechnology, Technical University of Munich, 80333 Munich, Germany;Presented at the Eurosensors 2018 Conference, Graz, Austria, 9–12 September 2018.

关键词: MEMS transducers;    acoustic high-frequency effects;    compact model;    multiphysics;    system-level simulation;    virtual prototyping;   

DOI  :  10.3390/proceedings2131024

学科分类：社会科学、人文和艺术（综合）

来源: mdpi

【 摘 要 】

We present a fully coupled multi-energy domain compact model of a MEMS microphone dedicated to the investigation of acoustic high-frequency effects affecting the device behavior. To this end, the components of the acoustic domain are described using physics-derived analytical expressions. Finite element simulations are employed to confirm the validity of the acoustic submodel. The differential equations governing the small-signal dynamics of the electrically actuated transducer are solved in the frequency domain with MATLAB. The full-system model is calibrated and validated with experimental data. Measurements and simulations show very good agreement, which highlights the reliability of the presented modeling approach.

【 授权许可】

CC BY