Proceedings | |
Reliable Compact Models for the Investigation of Acoustic High-Frequency Effects in MEMS Transducers | |
Krumbein, Ulrich1  Manz, Johannes2  Bosetti, Gabriele3  Schrag, Gabriele4  | |
[1] Author to whom correspondence should be addressed.;Infineon Technologies AG, 85579 Neubiberg, Germany;Institute for Physics of Electrotechnology, Technical University of Munich, 80333 Munich, Germany;Presented at the Eurosensors 2018 Conference, Graz, Austria, 9â12 September 2018. | |
关键词: MEMS transducers; acoustic high-frequency effects; compact model; multiphysics; system-level simulation; virtual prototyping; | |
DOI : 10.3390/proceedings2131024 | |
学科分类:社会科学、人文和艺术(综合) | |
来源: mdpi | |
【 摘 要 】
We present a fully coupled multi-energy domain compact model of a MEMS microphone dedicated to the investigation of acoustic high-frequency effects affecting the device behavior. To this end, the components of the acoustic domain are described using physics-derived analytical expressions. Finite element simulations are employed to confirm the validity of the acoustic submodel. The differential equations governing the small-signal dynamics of the electrically actuated transducer are solved in the frequency domain with MATLAB. The full-system model is calibrated and validated with experimental data. Measurements and simulations show very good agreement, which highlights the reliability of the presented modeling approach.
【 授权许可】
CC BY
【 预 览 】
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RO201910259920078ZK.pdf | 931KB | download |