Sensing Characteristics of Smart Microsensor Systems for Measuring Relative Humidity in Pressurized Air

Proceedings

Wettstein, Sascha¹  Keller, Dino²  Graf, Markus³  Weller, Fabian⁴ 

[1] Author to whom correspondence should be addressed.;MBW Calibration AG, Seminarstrasse 55/57, 5430 Wettingen, Switzerland;Presented at the Eurosensors 2018 Conference, Graz, Austria, 9–12 September 2018.;Sensirion AG, Laubisruetistrasse 50, 8712 Staefa, Switzerland

关键词: humidity sensor;    enhancement factor;   

DOI  :  10.3390/proceedings2130871

学科分类：社会科学、人文和艺术（综合）

来源: mdpi

【 摘 要 】

The detailed experimental investigation of the performance of a commercially available smart humidity sensor used for the measurement of relative humidity at elevated pressures (0.1–2 MPa) is reported. A dedicated set-up was developed for generating defined humidities in pressurized air. The measurements reveal that the pressure coefficient of the sensor deviation at a given relative humidity condition cannot be attributed solely to the enhancement factor of the humid air. For such microsensors, an additional sensor-specific pressure compensation factor was determined which is significant for precise measurements in applications with pressurized air.

【 授权许可】

CC BY