Sensing Characteristics of Smart Microsensor Systems for Measuring Relative Humidity in Pressurized Air

Proceedings

Sascha Wettstein¹  Markus Graf²  Fabian Weller²  Dino Keller² 

[1] MBW Calibration AG, Seminarstrasse 55/57, 5430 Wettingen, Switzerland;Sensirion AG, Laubisruetistrasse 50, 8712 Staefa, Switzerland;

关键词: humidity sensor;    enhancement factor;   

DOI  :  10.3390/proceedings2130871

来源: DOAJ

【 摘 要 】

The detailed experimental investigation of the performance of a commercially available smart humidity sensor used for the measurement of relative humidity at elevated pressures (0.1–2 MPa) is reported. A dedicated set-up was developed for generating defined humidities in pressurized air. The measurements reveal that the pressure coefficient of the sensor deviation at a given relative humidity condition cannot be attributed solely to the enhancement factor of the humid air. For such microsensors, an additional sensor-specific pressure compensation factor was determined which is significant for precise measurements in applications with pressurized air.

【 授权许可】

Unknown