Modelling Fluid Damping of Non-Conventional Vibration Modes in MEMS Resonators

Proceedings

Pfusterschmied, Georg¹  Schmid, Ulrich²  Platz, Daniel³ 

[1] Author to whom correspondence should be addressed.;Presented at the Eurosensors 2018 Conference, Graz, Austria, 9–12 September 2018.;TU Wien, Institute of Sensor and Actuator Systems, Gußhaustraße 27-29, A-1040 Vienna, Austria

关键词: MEMS;    NEMS;    fluid sensing;    fluid-structure interaction;    stokes flow;    boundary integral method;    damping;    quality factor;   

DOI  :  10.3390/proceedings2130896

学科分类：社会科学、人文和艺术（综合）

来源: mdpi

【 摘 要 】

Resonant micro- and nanoelectromechanical systems (MEMS/NEMS) are typically subject to interaction with a liquid or gaseous environment. Recently, it has been demonstrated that non-conventional eigenmodes exhibit remarkably high quality factors (Q factors) in liquids. However, the physical origin of this phenomenon remains elusive. Here we introduce a definition of non-conventional eigenmodes for cantilever structures and develop a boundary integral method for describing the interaction of an incompressible viscous fluid and a non-conventional eigenmode of a MEMS/NEMS resonator. With this framework we are able to study the influence of the mode shape on the fluid-structure interaction.

【 授权许可】

CC BY