Cross-Linked Nanoparticle Membranes for Microelectromechanical Chemical Sensors and Pressure Sensors

Proceedings

Bittinger, Sophia Caroline¹  Schlicke, Hendrik²  Hartmann, Hauke³  Rebber, Matthias⁴ 

[1] Author to whom correspondence should be addressed.;Fraunhofer Center for Applied Nanotechnology CAN, Grindelallee 117, 20146 Hamburg, Germany;Institute of Physical Chemistry, University of Hamburg, Grindelallee 117, 20146 Hamburg, Germany;Presented at the Eurosensors 2018 Conference, Graz, Austria, 9–12 September 2018

关键词: gold;    nanoparticles;    nanocomposites;    membranes;    pressure sensors;    chemical sensors;    actuators;    resonators;    MEMS;    NEMS;   

DOI  :  10.3390/proceedings2130821

学科分类：社会科学、人文和艺术（综合）

来源: mdpi

【 摘 要 】

We present novel microelectromechanical chemical sensors for the detection of volatile organic compounds based on electrostatically actuated, nanometer-thin, freestanding membranes of organically cross-linked gold nanoparticles. The sensors employ quasi-static deflection amplitudes or resonance frequency shifts of the membranes as highly sensitive sensing signals and are capable of detecting analytes at concentrations down to the low ppm range. We show that the devices can further be utilized for analyte discrimination. Additionally, we demonstrate that freestanding GNP membranes can be used for the fabrication of highly sensitive resistive pressure sensors.

【 授权许可】

CC BY