期刊论文详细信息
Proceedings
Silicon Microcantilevers with ZnO Nanorods/Chitosan-SAMs Hybrids on Its Back Surface for Humidity Sensing
Bertke, Maik1  Li, Xuejing2  Xu, Jiushuai3 
[1] Author to whom correspondence should be addressed.;Presented at the Eurosensors 2018 Conference, Graz, Austria, 9–12 September 2018;TU Braunschweig, Department of Semiconductor Technology, Braunschweig, Germany and Laboratory for Emerging Nanometrology (LENA), 38106 Braunschweig, Germany
关键词: microcantilever;    ZnO nanorods;    Chitosan SAMs;    humidity sensing;   
DOI  :  10.3390/proceedings2130838
学科分类:社会科学、人文和艺术(综合)
来源: mdpi
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【 摘 要 】

This paper reports a piezoresistive silicon microcantilever-based gravimetric humidity sensor, where a ZnO nanofilm (200 nm) and ZnO nanorods (NRs) with different lengths (1.5 µm and 6 µm) modified with chitosan self-assembled monolayers (SAMs) are coated on the microcantilevers’ back surface as the sensing material. Thanks to the new sensor design, the resonant frequency (RF) shifts induced by the mass adsorption on the high surface-area-to-volume ratio, hybrid-sensing nanostructure can be tracked directly by monitoring the output of the p-diffused full Wheatstone bridge. By depositing ZnO NRs and Chitosan SAMs, direct-reading microcantilevers with high repeatability, reliability and high sensitivity (15 Hz/%RH) can be achieved.

【 授权许可】

CC BY   

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