Silicon Microcantilevers with ZnO Nanorods/Chitosan-SAMs Hybrids on Its Back Surface for Humidity Sensing

Proceedings

Maik Bertke¹  Andi Setiono¹  Angelika Schmidt¹  Jiushuai Xu¹  Xuejing Li¹  Erwin Peiner¹  Michael Fahrbach¹ 

[1] TU Braunschweig, Department of Semiconductor Technology, Braunschweig, Germany and Laboratory for Emerging Nanometrology (LENA), 38106 Braunschweig, Germany;

关键词: microcantilever;    ZnO nanorods;    Chitosan SAMs;    humidity sensing;   

DOI  :  10.3390/proceedings2130838

来源: DOAJ

【 摘 要 】

This paper reports a piezoresistive silicon microcantilever-based gravimetric humidity sensor, where a ZnO nanofilm (200 nm) and ZnO nanorods (NRs) with different lengths (1.5 µm and 6 µm) modified with chitosan self-assembled monolayers (SAMs) are coated on the microcantilevers’ back surface as the sensing material. Thanks to the new sensor design, the resonant frequency (RF) shifts induced by the mass adsorption on the high surface-area-to-volume ratio, hybrid-sensing nanostructure can be tracked directly by monitoring the output of the p-diffused full Wheatstone bridge. By depositing ZnO NRs and Chitosan SAMs, direct-reading microcantilevers with high repeatability, reliability and high sensitivity (15 Hz/%RH) can be achieved.

【 授权许可】

Unknown