MEMS Non-Absorbing Electromagnetic Power Sensor Employing the Effect of Radiation Pressure

Proceedings

Ryger, Ivan¹  Simons, Matthew²  Artusio-Glimpse, Alexandra³  Shaw, Gordon⁴  Williams, Paul⁵  Holloway, Christopher⁶ 

[1] Associate of the National Institute of Standards and Technology, Boulder, CO 80305, USA;Author to whom correspondence should be addressed.;Department of Physics, University of Colorado, Boulder, CO 80309, USA;National Institute of Standards and Technology, 100 Bureau Dr, Gaithersburg, MD 20899, USA;National Institute of Standards and Technology, 325 Broadway, Boulder, CO 80305, USA;Presented at the Eurosensors 2018 Conference, Graz, Austria, 9–12 September 2018

关键词: radiation pressure;    capacitive sensor;    lock-in amplifier;    silicon micromachining;    acoustic noise suppression;    tilt immunity;    distributed bragg reflector;    Archimedian spiral spring;   

DOI  :  10.3390/proceedings2130767

学科分类：社会科学、人文和艺术（综合）

来源: mdpi

【 摘 要 】

We demonstrate a compact electromagnetic power sensor based on force effects of electromagnetic radiation onto a highly reflective mirror surface. Unlike the conventional power measurement approach, the photons are not absorbed and can be further used in the investigated system. In addition, the exerted force is frequency-independent, yielding a wide measurement frequency span being practically limited by the wavelength-dependent mirror reflection coefficient. The mechanical arrangement of two sensing elements in tandem suppresses the influence of gravity and vibrations on the power reading. We achieve a noise floor of about 1 W/√Hz and speed of 100 ms, being practically limited by sensor’s dynamics and lock-in amplifier filter settling time.

【 授权许可】

CC BY