Gas-Flow Sensor Based on Self-Oscillating and Self-Sensing Cantilever

Proceedings

Ivanov, Tzvetan¹  Zöllner, Jens-Peter²  Stauffenberg, Jaqueline³  Durstewitz, Steve⁴  Holz, Mathias⁵ 

[1] Author to whom correspondence should be addressed.;Department of Micro- and Nanoelectronic Systems, Ilmenau University of Technology, Gustav-Kirchhoff-Str.1, 98693 Ilmenau, Germany;ETG Entwicklungs-und Technologie Gesellschaft mbH, Am Eichicht 1 A, 98693 Ilmenau, Germany;Electronic & Sensors, Am Vogelherd 10 (Tor 1), 98693 Ilmenau, Germany;Presented at the Eurosensors 2018 Conference, Graz, Austria, 9–12 September 2018

关键词: gas-flow sensor;    cantilever;    piezo-resistive sensing;    PLL;    resonance mode;   

DOI  :  10.3390/proceedings2130846

学科分类：社会科学、人文和艺术（综合）

来源: mdpi

【 摘 要 】

In this work the application of a self-sensing and self-actuating cantilever for gas-flow measurement is investigated. The cantilever placed in the flow is excited permanently at its first resonance mode. Simultaneously the resonance amplitude, the resonance frequency and the static bending of the cantilever are detected. All three sizes are related to the velocity of the gas-flow.

【 授权许可】

CC BY